Field of study: Nanotechnologies
Level: Bachelor
Detailed prerequisites: Basics of semiconductor materials
Objective of the course/learning outcomes: These lectures will review the basics physics and technology of CMOS transistors and circuits for logic application. The operation of Metal Oxyde Semiconductor transistors at the Nanoscale will be discussed, underlying recent progresses in this area. Several technological aspects (processes) will be presented. Finally, an original and emerging technology (Silicon On Insulator) will be introduced in more details.
Lecture content:
- Short Introduction to SC and SC technologies (first course)
- Cold Plasma for SC; PECVD and etching (second and third course)
- Examples of new processes and flow chart (fourth and fifth course)
Teaching language: English
Detailed examination modalities: written exam
Instructor: Prof. Christophe Vallée
Department: Université de Grenoble / Commissariat à l'énergie atomique et aux énergies alternatives (CEA)
e-mail : CVallee@sunypoly.edu
Level: Bachelor
Detailed prerequisites: Basics of semiconductor materials
Objective of the course/learning outcomes: These lectures will review the basics physics and technology of CMOS transistors and circuits for logic application. The operation of Metal Oxyde Semiconductor transistors at the Nanoscale will be discussed, underlying recent progresses in this area. Several technological aspects (processes) will be presented. Finally, an original and emerging technology (Silicon On Insulator) will be introduced in more details.
Lecture content:
- Short Introduction to SC and SC technologies (first course)
- Cold Plasma for SC; PECVD and etching (second and third course)
- Examples of new processes and flow chart (fourth and fifth course)
- Metal gate first vs metal gate last, FDSOI and FinFet
- Damascene and dual damascene plasma etching
- HDP-CVD and ALD for gap filling and conformality
- ALD for patterning: double and quadruple patterning
Teaching language: English
Detailed examination modalities: written exam
Instructor: Prof. Christophe Vallée
Department: Université de Grenoble / Commissariat à l'énergie atomique et aux énergies alternatives (CEA)
e-mail : CVallee@sunypoly.edu